JPH0256309B2 - - Google Patents
Info
- Publication number
- JPH0256309B2 JPH0256309B2 JP61038877A JP3887786A JPH0256309B2 JP H0256309 B2 JPH0256309 B2 JP H0256309B2 JP 61038877 A JP61038877 A JP 61038877A JP 3887786 A JP3887786 A JP 3887786A JP H0256309 B2 JPH0256309 B2 JP H0256309B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- boron
- sintered body
- sintering
- fine powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 47
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 31
- 238000005245 sintering Methods 0.000 claims description 25
- 229910052582 BN Inorganic materials 0.000 claims description 15
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 15
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 15
- 229910052796 boron Inorganic materials 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 14
- 150000001639 boron compounds Chemical class 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000012298 atmosphere Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 238000000197 pyrolysis Methods 0.000 claims description 3
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052580 B4C Inorganic materials 0.000 claims description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052810 boron oxide Inorganic materials 0.000 claims description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical group O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000010292 electrical insulation Methods 0.000 description 6
- 230000000704 physical effect Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 4
- 239000012776 electronic material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- VIPCDVWYAADTGR-UHFFFAOYSA-N trimethyl(methylsilyl)silane Chemical compound C[SiH2][Si](C)(C)C VIPCDVWYAADTGR-UHFFFAOYSA-N 0.000 description 2
- 239000011882 ultra-fine particle Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- QDMRQDKMCNPQQH-UHFFFAOYSA-N boranylidynetitanium Chemical compound [B].[Ti] QDMRQDKMCNPQQH-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61038877A JPS62197353A (ja) | 1986-02-24 | 1986-02-24 | 炭化けい素焼結体の製造方法 |
| US07/017,818 US4762810A (en) | 1986-02-24 | 1987-02-24 | Method for the preparation of a sintered body of silicon carbide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61038877A JPS62197353A (ja) | 1986-02-24 | 1986-02-24 | 炭化けい素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62197353A JPS62197353A (ja) | 1987-09-01 |
| JPH0256309B2 true JPH0256309B2 (en]) | 1990-11-29 |
Family
ID=12537447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61038877A Granted JPS62197353A (ja) | 1986-02-24 | 1986-02-24 | 炭化けい素焼結体の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4762810A (en]) |
| JP (1) | JPS62197353A (en]) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62260774A (ja) * | 1986-05-01 | 1987-11-13 | 新日本製鐵株式会社 | 炭化珪素系複合セラミックス焼結体 |
| US5034355A (en) * | 1987-10-28 | 1991-07-23 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Tough silicon carbide composite material containing fibrous boride |
| JPH0627036B2 (ja) * | 1988-06-22 | 1994-04-13 | 日本鋼管株式会社 | 高強度高靭性ＴｉＢ▲下２▼セラミックス |
| US4962069A (en) * | 1988-11-07 | 1990-10-09 | Dow Corning Corporation | Highly densified bodies from preceramic polysilazanes filled with silicon carbide powders |
| US5094985A (en) * | 1989-01-30 | 1992-03-10 | Kazunori Kijima Kyoto | Sintered silicon carbide body with high thermal conductivity and process of producing the same |
| US5093039A (en) * | 1989-01-30 | 1992-03-03 | Kazunori Kijima | Highly pure sintered carbide with high electric conductivity and process of producing the same |
| US5100844A (en) * | 1989-02-06 | 1992-03-31 | Ethyl Corporation | Preceramic compositions and ceramic products |
| US5139719A (en) * | 1989-08-10 | 1992-08-18 | The British Petroleum Company P.L.C. | Sintering process and novel ceramic material |
| US5201947A (en) * | 1989-09-29 | 1993-04-13 | Ethyl Corporation | Preceramic compositions and ceramic products |
| US5032550A (en) * | 1989-10-13 | 1991-07-16 | Aluminum Company Of America | High impact resistant ceramic composite |
| JPH06188461A (ja) * | 1992-06-24 | 1994-07-08 | Orion Mach Co Ltd | ペルチェ素子モジュール |
| JP3175483B2 (ja) * | 1994-06-30 | 2001-06-11 | 日本鋼管株式会社 | 窒化ホウ素含有材料およびその製造方法 |
| JP5132034B2 (ja) * | 2005-03-07 | 2013-01-30 | コバレントマテリアル株式会社 | 高比抵抗炭化ケイ素焼結体 |
| CN101193663A (zh) * | 2005-04-11 | 2008-06-04 | 佐治亚技术研究公司 | 碳化硼部件及其制备方法 |
| JPWO2007015550A1 (ja) * | 2005-08-03 | 2009-02-19 | イビデン株式会社 | 炭化珪素質焼成用治具及び多孔質炭化珪素体の製造方法 |
| US7989380B2 (en) * | 2008-11-26 | 2011-08-02 | Ceradyne, Inc. | High resistivity SiC material with B, N and O as the only additions |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4209474A (en) * | 1977-08-31 | 1980-06-24 | General Electric Company | Process for preparing semiconducting silicon carbide sintered body |
| US4179299A (en) * | 1978-05-01 | 1979-12-18 | The Carborundum Company | Sintered alpha silicon carbide ceramic body having equiaxed microstructure |
| US4649002A (en) * | 1985-04-01 | 1987-03-10 | Kennecott Corporation | System for preventing decomposition of silicon carbide articles during sintering |
-
1986
- 1986-02-24 JP JP61038877A patent/JPS62197353A/ja active Granted
-
1987
- 1987-02-24 US US07/017,818 patent/US4762810A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4762810A (en) | 1988-08-09 |
| JPS62197353A (ja) | 1987-09-01 |
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